Materials (Mar 2020)

Spin Coating and Micro-Patterning Optimization of Composite Thin Films Based on PVDF

  • Anh Ngoc Nguyen,
  • Jeanne Solard,
  • Huyen Thi Thanh Nong,
  • Chirine Ben Osman,
  • Andres Gomez,
  • Valérie Bockelée,
  • Sylvie Tencé-Girault,
  • Frédéric Schoenstein,
  • Maite Simón-Sorbed,
  • Anna Esther Carrillo,
  • Silvana Mercone

DOI
https://doi.org/10.3390/ma13061342
Journal volume & issue
Vol. 13, no. 6
p. 1342

Abstract

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We optimize the elaboration of very thin film of poly(vinylidene fluoride) (PVDF) polymer presenting a well-controlled thickness, roughness, and nano-inclusions amount. We focused our effort on the spin coating elaboration technique which is easy to transfer to an industrial process. We show that it is possible to obtain continuous and smooth thin films with mean thicknesses of 90 nm by properly adjusting the concentration and the viscosity of the PVDF solution as well as the spin rate and the substrate temperature of the elaboration process. The electro-active phase content versus the magnetic and structural properties of the composite films is reported and fully discussed. Last but not least, micro-patterning optical lithography combined with plasma etching has been used to obtain well-defined one-dimensional micro-stripes as well as squared-rings, demonstrating the easy-to-transfer silicon technology to polymer-based devices.

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