Potentiality of zinc oxide nanosensor prepared by a new electroplating method on p-Si (1 1 1) wafer substrate

Abstract

Nanostructured ZnO thin films were deposited on p-Si (1 1 1) substrates using a new electrodeposition method. Electrical and sensing properties were investigated. Variations of the resistance measured between two points of the ZnO film, have shown a maximum sensitivity (δ = 10) in the presence of gas ‹CO› and (δ = 14,70) in the presence of ‹C2H5OH› at a temperature of 300 °C. Therefore, we can say that the sensitivity tests indicate that the sensor consisting of a nanometer zinc oxide layer is more efficient at temperatures beyond 100 °C. Moreover, the sensing element has demonstrated a good response to reducing gases species. Keywords: Electrodeposition, ZnO, Ethanol/carbon monoxide sensor, Response/recovery times, Sensitivity