Numerical Simulation of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystal Growth by Czochralski Method with an Insulation Lid
Dan Wu,
Ning Xia,
Keke Ma,
Jiabin Wang,
Cheng Li,
Zhu Jin,
Hui Zhang,
Deren Yang
Affiliations
Dan Wu
State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
Ning Xia
Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311200, China
Keke Ma
Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311200, China
Jiabin Wang
Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311200, China
Cheng Li
State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
Zhu Jin
State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
Hui Zhang
State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
Deren Yang
State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
The effect of an insulation lid on the growth of 4-inch β-Ga2O3 single crystals by the Czochralski method is analyzed by numerical simulation. The insulation lid mainly hinders upward radiant heat transfer from the melt and crucible and increases the axial temperature gradient in the crystal. Such benefits make the melt/crystal interface convex, which is conducive to suppressing spiral growth and growing large crystals with high quality. Materials with low thermal conductivity λ and low emissivity ε are the optimal choices for making an insulation lid. The inner hole has a great influence on the isolation of radiant heat, and it is determined that the maximum size of the inner diameter Din should not be larger than 130 mm. Thermal stress analysis results indicated that the insulation lid will cause a better stress distribution, illustrating the effect of the insulation lid on the quality of a cylindrical crystal.
