This work presents analysis and development of an evanescent waveguide sensor system, which integrates an amorphous silicon photodiode and a glass-diffused waveguide. Design of the system includes a study of thickness and refractive index of the transparent electrode of the diode, which are crucial parameters for the optimization of the optical coupling between the waveguide and the photodetector. Preliminary electro-optical measurements on the fabricated device show excellent system performances, and suggest its use for on-chip detection in lab-on-chip applications.
