Design and implement of high accuracy HV-CCPS for high power discharge pumped excimer laser

Abstract

Abstract This paper presents the design of a 30 kV/2.03 A high-voltage capacitor charging power supply, centered around an enhanced resonant converter, for use in high-power excimer lasers and other related pulsed power applications. Typically, stray parameters of high-voltage high-frequency transformers negatively impact converter performance. Based on an analysis of the series resonant converter, an enhanced resonant converter is proposed, which leverages the stray parameters of the transformer to benefit the converter. Through calculations and simulations, it was found that a smaller resonant capacitor (Cp) enables dual-pulse rapid charging in the early stages of charging and single-pulse slow charging in the later stages. The transition point between dual and single pulses occurs later in the charging process, allowing for high power output while significantly improving charging accuracy and reducing the resonant current crest factor. Additionally, to address the underdamped discharge process in the downstream pulsed power applications, a protection network was designed, reducing the reverse peak voltage by approximately 80%. Finally, a prototype was tested on an excimer laser, achieving a peak power of 60.9 kW and an accuracy of 0.22%, with a maximum laser output power of 304.2 W. The experimental results validate the proposed solution.

Keywords

• High power resonant converter
• Capacitor charging power supply (CCPS)
• Series resonance
• Series-parallel resonant
• Excimer laser