Radiation technology for improvement of ohmic contacts to the electronic device elements

Abstract

Two types of metallization (Au, Ti) to a fullerene-bearing material are investigated. The advantages of microwave annealing are noted. Microwave annealing of polymer-fullerene layers with both metallizations is studied; the resistance decreases in both cases. The titanium metallization seems to be more promising than the gold one. The mechanisms responsible for titanium metallization quality are presented.

Keywords

• fullerene films metallization
• microwave annealing