Silicon Radiation Detector Technologies: From Planar to 3D

Abstract

Silicon radiation detectors, a special type of microelectronic sensor which plays a crucial role in many applications, are reviewed in this paper, focusing on fabrication aspects. After addressing the basic concepts and the main requirements, the evolution of detector technologies is discussed, which has been mainly driven by the ever-increasing demands for frontier scientific experiments.

Keywords

• silicon radiation detectors
• fabrication technology
• planar detectors
• 3D detectors