INVESTIGATION OF THICKNESS DEPENDENCES OF REFRACTIVE INDEX FOR NANOSIZED ACETONE FILM BY ELLIPSOMETRIC METHOD

Abstract

On the basis of analyzing the spectrum of the ellipsometric angles ψ and Δ the investigation of thickness dependence of refractive index for nanosized acetone films on silicon surface using the photometric spectroellipsometer was carried out.

Keywords

• photometric spectroellipsometer
• nanosized acetone films
• refractive index
• thickness dependence