A Role of Base Plate Jerk Feedback Scheme for Suppression of the Self Vibration in a Pneumatic Positioning Stage

Abstract

In this study, a positioning stage is considered, which is actuated by four pneumatic cylinders and vertically supported by four coil-type spring isolators. Previously, we realized the base plate jerk feedback (BPJFB) to be analogues to a Master-Slave system which can synchronize the motion of the stage as a Slave to the motion of the base plate as a Master. However, in the case of real positioning, the stage had slightly self oscillation with higher frequency due to the higher gains set to the outer feedback loop controller besides its oscillation due to the natural vibration of the base plate. The self oscillation of stage was misunderstood to be the natural vibration of base plate due to the reaction force. However, according to the experimental results, the BPJFB scheme was able to control both of the mentioned vibrations. Suppression of the self vibration of stage is an interesting phenomenon, which should be experimentally investigated. Therefore, the current study focuses on the suppression of the self vibration of stage by using the BPJFB scheme. The experimental results show that besides operating as a Master-Slave synchronizing system, the PBJFB scheme is able to increase the damping ratio and stiffness of stage against its self vibration. This newly recognized phenomenon contributes to further increase the proportional gain of the outer feedback loop controller. As a result, the positioning speed and stability can be improved.

Keywords

• pneumatic stage
• base plate
• jerk feedback
• pdd2 compensator