Applied Physics Express (Jan 2023)

Demonstration of III-nitride vertical-cavity surface-emitting lasers with a topside dielectric curved mirror

  • Nathan C. Palmquist,
  • Jared A. Kearns,
  • Stephen Gee,
  • Arturo Juan,
  • Srinivas Gandrothula,
  • Michael Lam,
  • Steven P. Denbaars,
  • Shuji Nakamura

DOI
https://doi.org/10.35848/1882-0786/ad119b
Journal volume & issue
Vol. 17, no. 1
p. 016504

Abstract

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We report long cavity (65 λ ) GaN-based vertical-cavity surface-emitting lasers (VCSELs) with a topside dielectric concave mirror, an ion implanted current aperture, and a bottomside nanoporous GaN distributed Bragg reflector. Under pulsed operation, a VCSEL with a 10 μ m aperture and a curved mirror with a radius of curvature of 120 μ m had a threshold current density of 14 kA cm ^−2 , and a maximum output power of 370 μ W for a lasing mode at 404.5 nm. The longitudinal performance has a side-mode suppression ratio of 30 dB up to a current density of approximately 40 kA cm ^−2 . Multiple transverse mode profiles are observed across several devices.

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