Multifunctional contamination-resistant coatings

Abstract

Surface contaminations can critically affect the performance of optical surfaces, in particular with respect to light scattering, optical losses, and laser stability. Thus, avoiding contaminations and reducing contamination-induced effects is of particular interest in the manufacturing of optical systems. By combining a specific thin film design with a tailored structural design, contamination-resistant coatings with a high optical quality can be realized. Most important is the balance of self-cleaningand light scattering-relevant surface roughness components.