Skin‐Inspired Capacitive Flexible Tactile Sensor with an Asymmetric Structure for Detecting Directional Shear Forces

Abstract

Abstract Flexible pressure sensors based on micro‐/nanostructures can be integrated into robots to achieve sensitive tactile perception. However, conventional symmetric structures, such as pyramids or hemispheres, can sense only the magnitude of a force and not its direction. In this study, a capacitive flexible tactile sensor inspired by skin structures and based on an asymmetric microhair structure array to perceive directional shear force is designed. Asymmetric microhair structures are obtained by two‐photon polymerization (TPP) and replication. Owing to the features of asymmetric microhair structures, different shear force directions result in different deformations. The designed device can determine the directions of both static and dynamic shear forces. Additionally, it exhibits large response scales ranging from 30 Pa to 300 kPa and maintains high stability even after 5000 cycles; the final relative capacitive change (ΔC/C0) is <2.5%. This flexible tactile sensor has the potential to improve the perception and manipulation ability of dexterous hands and enhance the intelligence of robots.

Keywords

• asymmetric microhair array
• capacitive
• directional shear force
• flexible tactile sensor
• two‐photon polymerization