Characterization of Otto Chips by Particle Swarm Optimization

Abstract

Abstract Recently a surface plasmon resonance (SPR) optical sensor, based on the Otto configuration — the Otto chip — has been developed. One essential step in the quality control of the fabrication process is characterization of the active region of several devices in a batch. Characterization is done by measuring the angular spectrum of the optical re ectance on several points across the active region of the device, and determining parameters by regression analysis of the data. Traditional gradient methods used in the regression process are extremely dependent on an initial guess and are not very efficient for batch analysis of curves, when those include poorly defined SPR spectra, where an initial guess may be hard to infer. An alternative approach for the regression problem is to model the analysis as an optimization problem and using an efficient stochastic algorithm. In this paper one discusses the use of Particle Swarm Optimization (PSO) for characterization of Otto chip devices. From comparative studies carried out in an existing Otto chip, it is observed that PSO can be a very efficient approach for batch analysis and yields better results when compared with the traditional gradient-based regression method.

Keywords

• particle swarm optimization
• surface plasmon resonance
• SPR
• Otto chip
• PSO
• regression analysis