ITO-Induced Nonlinear Optical Response Enhancement of Titanium Nitride Thin Films
Peng Lu,
Tingzhen Yan,
Jialei Huang,
Tian Xing,
Hao Liu,
Zhaoxia Han,
Xueke Xu,
Chunxian Tao
Affiliations
Peng Lu
Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China
Tingzhen Yan
Department of Printing and Pack Aging Engineering, Shanghai Publishing and Printing College, No. 100 Shuifeng Road, Shanghai 200093, China
Jialei Huang
Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China
Tian Xing
Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China
Hao Liu
Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China
Zhaoxia Han
Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China
Xueke Xu
Heng Mai Optics and Fine Mechanics (Hang Zhou) Co., Ltd., Hangzhou 311421, China
Chunxian Tao
Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China
A series of TiN/ITO composite films with various thickness of ITO buffer layer were fabricated in this study. The enhancement of optical properties was realized in the composite thin films. The absorption spectra showed that absorption intensity in the near-infrared region was obviously enhanced with the increase of ITO thickness due to the coupling of surface plasma between TiN and ITO. The epsilon-near-zero wavelength of this composite can be tuned from 935 nm to 1895 nm by varying the thickness of ITO thin films. The nonlinear optical property investigated by Z-scan technique showed that the nonlinear absorption coefficient (β = 3.03 × 10−4 cm/W) for the composite was about 14.02 times greater than that of single-layer TiN films. The theoretical calculations performed by finite difference time domain were in good agreement with those of the experiments.
