Microsystems & Nanoengineering (Jun 2021)

A thin-film temperature sensor based on a flexible electrode and substrate

  • Zhaojun Liu,
  • Bian Tian,
  • Bingfei Zhang,
  • Jiangjiang Liu,
  • Zhongkai Zhang,
  • Song Wang,
  • Yunyun Luo,
  • Libo Zhao,
  • Peng Shi,
  • Qijing Lin,
  • Zhuangde Jiang

DOI
https://doi.org/10.1038/s41378-021-00271-0
Journal volume & issue
Vol. 7, no. 1
pp. 1 – 14

Abstract

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Abstract Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.