The application of the life cycle assessment and life cycle costing for the treatment of microelectronic industry effluents

Abstract

The study explored the treatment of different wastewater by producing microelectronic components. It proposed using aerobic biological treatment for the first effluent containing tetramethyl ammonium hydroxide and chemical-physical processes for the other two streams having fluorides, phosphates, nitrates and acetic acid. The novel integrated process significantly reduced environmental impacts by an average of 50 % compared to current disposal methods. The economic analysis indicates a 30 % reduction in treatment costs for the first effluent and lesser reductions for the other two effluents. The study revealed that treating all three effluents in an integrated manner is cost-effective, reducing investment and operating costs.

Keywords

• TMAH
• Industrial effluent
• Microelectronic technology
• Sustainability analysis