Известия высших учебных заведений России: Радиоэлектроника (Oct 2016)

The Crystal Structure and Properties of Barium Zirconate Titanate and Barium Stannate Titanate Thin Films for Microwave Applications

  • A. V. Tumarkin,
  • S. V. Razumov,
  • A. G. Gagarin,
  • A. M. Cherniavskii,
  • N. A. Yalymov,
  • M. V. Zlygostov,
  • A. A. Poteshkina,
  • Y. A. Uvarenkova,
  • V. I. Ivanova

Journal volume & issue
Vol. 0, no. 5
pp. 61 – 64

Abstract

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Structural and radio frequency (RF) dielectric properties of thin films of ferroelectric solid solutions BaZrxTi1-xO3 and BaSnxTi1-xO3 obtained by RF magnetron sputtering of ceramic targets on Pt/ r-cut of Al2O3 sapphire substrate are investigated. A high tunability of thin layers and low values of dielectric loss acceptable for microwave application have been revealed.

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