Известия высших учебных заведений России: Радиоэлектроника (Oct 2016)
The Crystal Structure and Properties of Barium Zirconate Titanate and Barium Stannate Titanate Thin Films for Microwave Applications
Abstract
Structural and radio frequency (RF) dielectric properties of thin films of ferroelectric solid solutions BaZrxTi1-xO3 and BaSnxTi1-xO3 obtained by RF magnetron sputtering of ceramic targets on Pt/ r-cut of Al2O3 sapphire substrate are investigated. A high tunability of thin layers and low values of dielectric loss acceptable for microwave application have been revealed.