AIP Advances
(Jun 2021)
Small angle x-ray scattering (SAXS) and Q-space weighting filter for ×3 CD-extraction accuracy improvement
Yukihide Tsuji,
Doyun Kim,
Gwangsu Yoo,
ByungHyun Hwang,
Kwanghoon Kim,
Donhwan Lee,
Yoshinori Sasai,
Shinwook Yi,
Jaehoon Jeong,
Dongchul Ihm,
ChungSam Jun,
Dae Sin Kim
Affiliations
Yukihide Tsuji
Data and Information Technology Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Doyun Kim
Data and Information Technology Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Gwangsu Yoo
Data and Information Technology Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
ByungHyun Hwang
Semiconductor R&D Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Kwanghoon Kim
Semiconductor R&D Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Donhwan Lee
Semiconductor R&D Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Yoshinori Sasai
Samsung R&D Institute Japan, Sugasawa-cho, Tsurumi-ku, Yokohama-shi, Kanagawa-ken 230-0027, Japan
Shinwook Yi
Data and Information Technology Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Jaehoon Jeong
Data and Information Technology Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Dongchul Ihm
Semiconductor R&D Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
ChungSam Jun
Semiconductor R&D Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Dae Sin Kim
Data and Information Technology Center, Samsung Electronics, Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
DOI
https://doi.org/10.1063/5.0037138
Journal volume & issue
Vol. 11,
no. 6
Abstract
Read online
A small angle x-ray scattering simulator has been developed for metrology and inspection applications based on the first Born approximation considering non-ideal equipment-related factors. The simulator shows good reproducibility in various device structures and measurement environments, including slit-configurations and incident angles. In addition, a Q-space adaptive weighting method is proposed to enhance about 300% accuracy, especially on non-single repeated pitch structures such as VNAND with complex x-ray diffraction patterns.
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