TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT

Abstract

Measuring tools used for the forming of programming motions in the assembly and opto-mechanical equipment of microelectronics were analyzed. The structure of the trajectory control system based on approach of hardware-in-the-loop modeling and real-time verification was proposed. The results of using the proposed trajectory control system in coordinate systems of precision equipment were shown.

Keywords

• координатная система
• система траекторного управления
• прецизионное оборудование
• микроэлектроника