Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors

Ye Chen; Dongqin Lu; Huan Xing; Haotian Ding; Junxian Luo; Hanwen Liu; Xiangxu Kong; Fei Xu

doi:10.3390/s24041079

Sensors (Feb 2024)

Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors

Ye Chen,
Dongqin Lu,
Huan Xing,
Haotian Ding,
Junxian Luo,
Hanwen Liu,
Xiangxu Kong,
Fei Xu

Affiliations

Ye Chen: MIIT Key Laboratory of Aerospace Information Materials and Physics, State Key Laboratory of Mechanics and Control for Aerospace Structures, College of Physics, Nanjing University of Aeronautics and Astronautics, Nanjing 211106, China
Dongqin Lu: National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China
Huan Xing: National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China
Haotian Ding: National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China
Junxian Luo: National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China
Hanwen Liu: National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China
Xiangxu Kong: National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China
Fei Xu: National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China

DOI: https://doi.org/10.3390/s24041079
Journal volume & issue: Vol. 24, no. 4
p. 1079

Abstract

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Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry–Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 °C. Finally, we discuss the limitations and opportunities for future development.

Published in Sensors

ISSN: 1424-8220 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Chemical technology
Website: http://www.mdpi.com/journal/sensors

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