Effective dielectric permittivity of ferroelectric film included in parallel-plate and planar ferroelectric capacitors

Abstract

The characteristics of parallel-plate and planar ferroelectric capacitors are investigated experi-mentally and theoretically. The size effect in Ba0.3Sr0.7TiO3 included into parallel-plate and planar capacitors is studied.

Keywords

• thin film
• size effect
• ferroelectrics
• capacitor