Cailiao Baohu (Feb 2023)

Analysis of the Reasons for Color Phenomenon of Silicon Carbide Coatings Prepared by Chemical Vapor Deposition

  • LI Jiang-tao, SUN Jia-qing, WEI Qing-bo, ZHANG Dong-sheng, MA Mei-xia

DOI
https://doi.org/10.16577/j.issn.1001-1560.2023.0050
Journal volume & issue
Vol. 56, no. 2
pp. 179 – 182

Abstract

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In view of the color phenomenon of silicon carbide (SiC) coatings prepared by chemical vapor deposition (CVD) in engineering applications，the effects of different air flow rates on the surface morphology and microstructure of CVD-SiC coatings were studied by the means of scanning electron microscopy (SEM)，energy spectroscopy (EDS) and X-ray diffractometer (XRD).Results showed that the O2 in the air participated in the reaction to form SiO2 phase，which was the main reason for the color phenomenon on the surface of the coatings；the differences in SiO2content and coating thickness made the coating color different；with the increase of air flow，the microscopic morphologies of the coating changed from“gravel-like”to“cauliflower-like”，and they were“rod-like”finally，which caused a decrease in the compactness of the coating.

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