Digital photonic production of 3D micro fluidics in glass by high speed micro scanner

Abstract

Digital photonic production of 3D microfluidic devices and assembled micro mechanicsinside fused silica glass is carried out using In-volume Selective Laser-induced Etching (ISLE).From CAD data of digital 3D objects the trajectories of the laser focus are automatically generated. The CAM software has been developed controlling different fs- and ps-lasers, the beam deflection systems and the translation stages to produce the structures automatically.