Analytical modeling of mechanical behavior of structures: Comparative analysis, experimental validation and numerical correction with FEM of material defects generated by anisotropic etching

Abstract

This paper presented semi-analytical approach in order to investigate the influence of manufacturing process defects on the elasticity of thin microbeam. The Rayleigh Beam Model (RBM) will be analyzed and corrected using 3D FEM scripts including the effects of the cross-section shape and the under-etching. This model was tested on measurements of thin chromium microbeam of dimensions (80 × 2 × 0.95 μm3). The results show that the influence of defects is very significant for the extracted value of Young's modulus where it is very close to the measured value and it is about 279.1 GPa.