Reduced Order Component & System Level Modelling for Fluid-Solid Interactions in Complex MEMS Devices

Abstract

The time-efficient and accurate implementation of physics-based fluidic damping effects is still one of the biggest challenges in the simulation of complex MEMS devices. Two modelling approaches utilizing the CRAIG/BAMPTON component mode synthesis method are discussed and compared in context of a highly automated model generation procedure. The first approach uses a modal projection technique with pressure profiles obtained from REYNOLDS flow simulations using the thermal-fluidic analogy. The second approach is based on the representation of the fluidic domain in form of a generalized KIRCHHOFFian lumped flow resistance network model. Both methods are generally suited for the simulation of structures like gyroscopes or accelerometers, but show different behaviors in terms of scaling and complexity during the model generation step and in the final ROM. The methods are demonstrated on examples and are compared to optical measurements of an out-of-plane teeter-totter type accelerometer.

Keywords

• MEMS
• sensors
• actuators
• simulation
• reduced order modelling
• fluidic damping
• modal superposition
• component mode synthesis