Open Physics
(Feb 2013)
Distributions of electric parameters in MOS structures on 3C-SiC substrate
- Piskorski Krzysztof,
- Przewlocki Henryk,
- Esteve Romain,
- Bakowski Mietek
Affiliations
- Piskorski Krzysztof
- Institute of Electron Technology, Al. Lotnikow 32/46, 02-668, Warsaw, Poland
- Przewlocki Henryk
- Institute of Electron Technology, Al. Lotnikow 32/46, 02-668, Warsaw, Poland
- Esteve Romain
- ACREO AB, Electrum 236, SE-164 40, Kista, Sweden
- Bakowski Mietek
- ACREO AB, Electrum 236, SE-164 40, Kista, Sweden
- DOI
-
https://doi.org/10.2478/s11534-012-0116-x
- Journal volume & issue
-
Vol. 11,
no. 2
pp.
231
– 238
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