ACS Omega
(Mar 2021)
Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM
- Ahmed M. Jasim,
- Xiaoqing He,
- Yangchuan Xing,
- Tommi A. White,
- Matthias J. Young
Affiliations
- Ahmed M. Jasim
- Department of Biomedical, Biological and Chemical Engineering, University of Missouri, Columbia, Missouri, United States
- Xiaoqing He
- Electron Microscopy Core, University of Missouri, Columbia, Missouri, United States
- Yangchuan Xing
- Department of Biomedical, Biological and Chemical Engineering, University of Missouri, Columbia, Missouri, United States
- Tommi A. White
- Electron Microscopy Core, University of Missouri, Columbia, Missouri, United States
- Matthias J. Young
- Department of Biomedical, Biological and Chemical Engineering, University of Missouri, Columbia, Missouri, United States
- DOI
-
https://doi.org/10.1021/acsomega.0c06124
- Journal volume & issue
-
Vol. 6,
no. 13
pp.
8986
– 9000
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