LiNbO<sub>3</sub> Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

Shitian Huang; Yao Shuai; Lu Lv; Zijie Wei; Wei Fan; Yuedong Wang; Dailei Zhu; Xinqiang Pan; Wenbo Luo; Chuangui Wu; Wanli Zhang

doi:10.3390/electronics12132964

Electronics (Jul 2023)

LiNbO<sub>3</sub> Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

Shitian Huang,
Yao Shuai,
Lu Lv,
Zijie Wei,
Wei Fan,
Yuedong Wang,
Dailei Zhu,
Xinqiang Pan,
Wenbo Luo,
Chuangui Wu,
Wanli Zhang

Affiliations

Shitian Huang: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Yao Shuai: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Lu Lv: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Zijie Wei: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Wei Fan: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Yuedong Wang: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Dailei Zhu: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Xinqiang Pan: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Wenbo Luo: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Chuangui Wu: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Wanli Zhang: School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China

DOI: https://doi.org/10.3390/electronics12132964
Journal volume & issue: Vol. 12, no. 13
p. 2964

Abstract

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This paper reports an LNO surface acoustic wave (SAW) resonator based on a shear horizontal mode with high operating frequency over 3 GHz, large electromechanical coupling of 33.54%, Q factor of 380, and a relatively good figure of merit (FOM) of 127. Combing crystal-ion-slicing (CIS) technology with a room temperature bonding method, a 4-inch single crystalline LNO thin film on silicon is prepared successfully. The influence of damaged LNO film on crystalline quality and SAW performance is comprehensively analyzed. After totally removing the damaged layer, the electromechanical coupling and Q factor is significantly improved. The high-performance SAW resonator possesses the potential to meet the requirements of SAW filters for the fifth-generation (5G) communication in terms of high frequency, large bandwidth, and a high-quality factor.

Published in Electronics

ISSN: 2079-9292 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Electronics
Website: http://www.mdpi.com/journal/electronics

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