ACS Omega (Nov 2021)

Study on Pyrolytic Mechanisms of n‑Perfluorosilanes SinF2n+2 (2 ≤ n < 6) and Perfluorocyclosilanes SinF2n (3 ≤ n ≤ 6)

  • Yuhan Zhao,
  • Anjiang Tang,
  • Qishan Huan,
  • Shiyun Tang,
  • Deju Wei,
  • Junjiang Guo,
  • LiJun Chen

DOI
https://doi.org/10.1021/acsomega.1c04828
Journal volume & issue
Vol. 6, no. 48
pp. 32841 – 32851

Abstract

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