Development of a grazing incidence X-ray diffractometer for BL02U2 at SSRF

Abstract

BackgroundTwo X-ray diffractometers manufactured by HUBER company are installed at BL02U2 beamline of Shanghai Synchrotron Radiation Facility (SSRF).PurposeThis study aims to develop a new grazing incidence diffractometer installed between the two HUBER diffractometers to further satisfy the needs of users for grazing incidence diffraction experimental methods.MethodsThe overall scheme of the grazing incidence diffractometer was introduced, followed by detail discussion on several important modules such as high-precision, high-load and large-stroke linear stage, three-dimensional adjustment platform for a detector, sample stage system, and the control system. A compatible operation of the three diffractometers was realized, and the MoS2 sample was taken as an example to obtain a typical experimental result of the grazing incidence diffractometer.ResultsThe grazing incidence X-ray diffractometer has been in operation for more than two years. The X-ray energy range of the diffractometer is 4.8~28 keV. The temporal resolution of the detector is 50 ms, and the maximum detection angle is 52°. Experimental results of MoS2 sample shown that the nanosheets are more likely to accumulate on the surface of silicon wafers along the (001) crystal plane.ConclusionsThe grazing incidence X-ray diffractometer developed in this study improves the experimental conditions for grazing incidence diffraction and expands the experimental platform for material surface science research at SSRF.

Keywords

• x-ray diffraction
• synchrotron radiation
• precision instrument