Microsystems & Nanoengineering (May 2022)
A versatile acoustically active surface based on piezoelectric microstructures
Abstract
Abstract We demonstrate a versatile acoustically active surface consisting of an ensemble of piezoelectric microstructures that are capable of radiating and sensing acoustic waves. A freestanding microstructure array embossed in a single step on a flexible piezoelectric sheet of polyvinylidene fluoride (PVDF) leads to high-quality acoustic performance, which can be tuned by the design of the embossed microstructures. The high sensitivity and large bandwidth for sound generation demonstrated by this acoustically active surface outperform previously reported thin-film loudspeakers using PVDF, PVDF copolymers, or voided charged polymers without microstructures. We further explore the directivity of this device and its use on a curved surface. In addition, high-fidelity sound perception is demonstrated by the surface, enabling its microphonic application for voice recording and speaker recognition. The versatility, high-quality acoustic performance, minimal form factor, and scalability of future production of this acoustically active surface can lead to broad industrial and commercial adoption for this technology.