BIO Web of Conferences (Jan 2024)

In-situ electrical characterization of MOSFET transistors using AFM-in-SEM solution

  • Novotny Ondrej,
  • Strakos Libor,
  • Patocka Marek,
  • Schanilec Vojtech,
  • Hegrova Veronika,
  • Celano Umberto,
  • Vystavel Tomas,
  • Neuman Jan

DOI
https://doi.org/10.1051/bioconf/202412924023
Journal volume & issue
Vol. 129
p. 24023

Abstract

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Keywords