Design and Experiment of a Novel High-Impact MEMS Ceramic Sandwich Accelerometer for Multi-Layer Target Penetration

Abstract

The output signal of traditional cantilever accelerometers usually overlapping and tailing during the high-velocity penetration process. And the sensitivity of traditional cantilever accelerometers cannot satisfy the application of multi-layer target penetration, that process contains large length-to-diameter ratios and high velocities. This paper proposes a novel high-impact Micro-Electro-Mechanical-System (MEMS) ceramic sandwich accelerometer (HMCSA) for the measurement of penetration-overload signals. Firstly, the HMCSA structure was designed and its structure-sensitive model was established. Then, the filling material in HMCSA was selected and the structure was simulated in ANSYS/LS-DYNA software. After that, the structure MEMS processing was introduced and the monitoring system was designed. Finally, the multi-layer target penetration process was simulated and HMCSA was tested in lab environment. The experiment verified that the design and manufacture of HMCSA was correct, and HMCSA can detect 30 000g acceleration.

Keywords

• Penetration layer counting
• cantilever accelerometer
• signal overlapping
• ceramic-plate-capacitor sensor