Micromachines (Aug 2023)

Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication

Lucia Romano,
Konstantins Jefimovs

Affiliations

Lucia Romano: Institute for Biomedical Engineering, University and ETH Zürich, 8092 Zürich, Switzerland
Konstantins Jefimovs: Paul Scherrer Institute, 5232 Villigen, Switzerland

DOI: https://doi.org/10.3390/mi14081630
Journal volume & issue: Vol. 14, no. 8
p. 1630

Abstract

Reactive ion etching (RIE) is the dominating technology for micromachining semiconductors with a high aspect ratio (HAR) [...]

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Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

About the journal