Terahertz metamaterial resonator with tunable Fano-resonance characteristic

Abstract

We present two types of tunable terahertz metamaterial (TTM) resonator. They are denoted as TTM-1 and TTM-2 for TTM resonators composed of a moveable metal frame carrying with inner disc and inner ring on Si substrates, respectively. The electromagnetic responses of TTM resonators are caused by the inductance-capacitance coupling effect between the incident THz wave into TTM structure. There is a Fano-resonance with a reflection intensity of 99% excited by electromagnetic wave within TTM-1 at 2.62 THz. By actively moving the metal frame in a specific direction, it enables a modulation of resonant frequency. The tuning ranges of TTM-1 and TTM-2 are 0.19 THz and 0.79 THz, respectively. Furthermore, TTM devices have the ability of anti-inference by moving metal frame transversely. It means TTM devices exhibit stable characteristic used in dynamic motion. Such designs of TTM configurations provide a high-efficiency THz resonator in the THz-waves applications such as filtering, switching, polarizing, sensing, and imaging fields.

Keywords

• Metamaterial
• Terahertz resonator
• MEMS
• Fano-resonance
• Switch