Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO<sub>3</sub> Films Grown by Laser Ablation
Zakhar Vakulov,
Evgeny Zamburg,
Daniil Khakhulin,
Andrey Geldash,
Dmitriy A. Golosov,
Sergey M. Zavadski,
Andrey V. Miakonkikh,
Konstantin V. Rudenko,
Anatoliy P. Dostanko,
Zhubing He,
Oleg A. Ageev
Affiliations
Zakhar Vakulov
Federal Research Centre The Southern Scientific Centre of the Russian Academy of Sciences (SSC RAS), 41 Chekhov St., 344006 Rostov-on-Don, Russia
Evgeny Zamburg
Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117583, Singapore
Daniil Khakhulin
Research and Education Centre ‘Nanotechnologies’, Southern Federal University, 2 Shevchenko St., 347922 Taganrog, Russia
Andrey Geldash
Research and Education Centre ‘Nanotechnologies’, Southern Federal University, 2 Shevchenko St., 347922 Taganrog, Russia
Dmitriy A. Golosov
Department of Electronic Technology and Engineering, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
Sergey M. Zavadski
Department of Electronic Technology and Engineering, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
Andrey V. Miakonkikh
Laboratory of Microstructuring and Submicron Devices, Valiev Institute of Physics and Technology of the Russian Academy of Sciences, 36/1 Nakhimovsky Av., 117218 Moscow, Russia
Konstantin V. Rudenko
Laboratory of Microstructuring and Submicron Devices, Valiev Institute of Physics and Technology of the Russian Academy of Sciences, 36/1 Nakhimovsky Av., 117218 Moscow, Russia
Anatoliy P. Dostanko
Department of Electronic Technology and Engineering, Belarusian State University of Informatics and Radioelectronics, 6 P. Brovki Str., 220013 Minsk, Belarus
Zhubing He
Department of Materials Science and Engineering, Shenzhen Key Laboratory of Full Spectral Solar Electricity Generation (FSSEG), Southern University of Science and Technology, 1088 Xueyuan Rd., Shenzhen 518055, Guangdong, China
Oleg A. Ageev
Research and Education Centre ‘Nanotechnologies’, Southern Federal University, 2 Shevchenko St., 347922 Taganrog, Russia
Energy conversion devices draw much attention due to their effective usage of energy and resulting decrease in CO2 emissions, which slows down the global warming processes. Fabrication of energy conversion devices based on ferroelectric and piezoelectric lead-free films is complicated due to the difficulties associated with insufficient elaboration of growth methods. Most ferroelectric and piezoelectric materials (LiNbO3, BaTiO3, etc.) are multi-component oxides, which significantly complicates their integration with micro- and nanoelectronic technology. This paper reports the effect of the oxygen pressure on the properties of nanocrystalline lithium niobate (LiNbO3) films grown by pulsed laser deposition on SiO2/Si structures. We theoretically investigated the mechanisms of LiNbO3 dissociation at various oxygen pressures. The results of x-ray photoelectron spectroscopy study have shown that conditions for the formation of LiNbO3 films are created only at an oxygen pressure of 1 × 10−2 Torr. At low residual pressure (1 × 10−5 Torr), a lack of oxygen in the formed films leads to the formation of niobium oxide (Nb2O5) clusters. The presented theoretical and experimental results provide an enhanced understanding of the nanocrystalline LiNbO3 films growth with target parameters using pulsed laser deposition for the implementation of piezoelectric and photoelectric energy converters.
