Preparation of Au@ZnO Nanofilms by Combining Magnetron Sputtering and Post-Annealing for Selective Detection of Isopropanol

Abstract

We demonstrate the highly sensitive and fast response/recovery gas sensors for detecting isopropanol (IPA), in which the Au-nanoparticles-modified ZnO (Au@ZnO) nanofilms act as the active layers. The data confirm that both the response and the response/recovery speed for the detection of IPA are significantly improved by adding Au nanoparticles on the surface of ZnO nanofilms. The gas sensor with an Optimum Au@ZnO nanofilm exhibits the highest responses of 160 and 7 to the 100 and 1 ppm IPA at 300 °C, which indicates high sensitivity and a very low detecting limit. The sensor also exhibits a very short response/recovery time of 4/15 s on the optimized Au@ZnO nanofilm, which is much shorter than that of the sensor with a pure ZnO nanofilm. The mechanisms of the performance improvement in the sensors are discussed in detail. Both the electronic sensitization and the chemical sensitization of the ZnO nanofilms are improved by the modified Au nanoparticles, which not only regulate the thickness of the depletion layer but also increase the amount of adsorbed oxygen species on the surfaces. This work proposes a strategy to develop a highly sensitive gas sensor for real-time monitoring of IPA.

Keywords

• ZnO nanofilm
• IPA
• Au nanoparticles
• magnetron sputtering