Micromachines (May 2023)

Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”

  • Agnė Žukauskaitė

DOI
https://doi.org/10.3390/mi14051067
Journal volume & issue
Vol. 14, no. 5
p. 1067

Abstract

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The enhanced piezoelectric properties of aluminum scandium nitride (Al1−xScxN or AlScN) were discovered in 2009 by Morito Akiyama’s team [...]

Keywords