Long-Distance Measurements Using a Chromatic Confocal Sensor

Abstract

In this work, we demonstrate the use of a chromatic confocal sensor for long-distance measurements. The sensor increases the working distance of state-of-the-art confocal sensors by a factor of 10, reaching a working distance of 620 mm. The chromatic aberration exhibited by a lens was utilized to establish the working range. The chromatic dispersion of the optics led to images of the different wavelength components at different longitudinal points along the optical axis. The sensor employs a robust algorithm to measure relative displacements of the sample’s motion. The calibration process simplifies data analysis and improves the accuracy of displacement measurements in experimental setups. To facilitate the design process, a simulator was developed specifically for this purpose. The calibration data obtained in both the experimental and the simulated data show that the simulator was able to predict the sensitivity with an error of 5%. We also describe the effect on the sensitivity of oversampling the spectrum. In addition, the superiority of low-pass filtering over Gaussian fitting over the detected spectrum is shown.

Keywords

• chromatic confocal sensor
• long-distance sensor