Structure, optical and electrical properties of Nb-doped ZnO transparent conductive thin films prepared by co-sputtering method

Abstract

Nb-doped ZnO thin films were fabricated on glass substrates by using co-sputtering with direct-current and radio frequency magnetron sputtering. The structures, optical and electrical performances of Nb-doped ZnO thin films were investigated. The results showed that all thin films have (0 0 2) c-axis preferential orientation. The minimum resistivity of 2.12×10−3Ωcm and the maximum carrier concentration of 2.39×1019cm−3 were obtained at the direct-current sputtering power of 10W, respectively. Nb-doped ZnO thin films have also shown high average transmittance of 89.6%, and lower surface roughness of 2.74nm. Meanwhile, a distinct absorption edge in the ultraviolet range of 300–400nm was observed in absorbance, the optical band gap of Nb-doped ZnO thin films illustrates an increased tendency with increasing Nb concentration.

Keywords

• magnetron sputtering
• co-sputtering
• zno thin films
• nb-doped zno