Numerical Solution of the Partial Differential Equation Bilaplacian Type by the Finite Element Method for the Simulation of Accelerometer-Type MEMS

Abstract

In this paper, the numerical solution of the Partial Differential Equation Bilaplacian type by the finite element method is presented in order to simulate the accelerometer-type MEMS behavior. The above mentioned solution is used to emulate the behavior of the deformation of an Accelerometer-type MEMS. The technique is the physically based modelling as a methodology of simulation with visualization that was used to solve the current problem. The first step is to solve the partial differential equation, which represents the structure, by the finite element method. This numerical method was instrumented in Octave, taking into account the primitive functions that it contains, and taking advantage of the powerful language, and free software resource. For this problem, the software built, it has results suitable for these types of problems and has well rates of error. Once these types of results have been obtained, the next step will be the rendering and interpretation of the results in a graphical way. In spite of the complexity and size in memory used by the numerical method, this procedure results be a good alternative for this case and maybe in other similar cases. In future works will be looking for parallelize some numerical methods.

Keywords

• partial differential equation
• numerical solution
• mems
• finite element method
• simulation