Development and Pilot Testing of an Electron Gun

Abstract

The paper describes a new model of three electrode electron gun with indirect heating cathode for multifunctional laboratory facility based on precise electron source for implementation X-ray analysis. Laboratory micro analytical facility was offered at the high-column scanning electron microscope SEM-101M. As a result of numerical simulation of the model of primary electron gun, technological design weaknesses are found and experimental setup cathode junction of free geometry is proposed. Numerical simulation of the electron-optical system gave recommendations for the selection of the geometric parameters and focusing electrode potential. Experimental investigation of the selected modes of installation confirmed reliability of the design while using it for the X-ray sources.

Keywords

• Cathode
• Electron gun
• Focusing
• X-ray sourc