Flexible Membrane LRC Strain Sensor Fabricated using MEMS Method

Abstract

A new flexible inductor-resistor-capacitor (LRC) low-strain sensor design with conventional architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible polyimide substrate is fabricated. The sensing elements are queried wirelessly by an RF spectrum analyzer with tracking generator option installed. These low-strain sensors are subjected to repetitive strains/pressure testing. The LRC sensor’s measured resonant frequency shifts reveal a 3rd degree polynomial loading relationship.

Keywords

• Flexible substrate
• Wireless strain sensor
• Membrane