Designing Ordered Structure with Piezoceramic Actuation Units (OSPAU) for Generating Continual Nanostep Motion

Abstract

Abstract Continual precision actuations with nanoscale resolution over large ranges have extensive requirements in advanced intelligent manufacturing and precise surgical robots. To produce continual nanostep motion, conventionally, multiple pairs of piezo‐actuators are employed to operate in inchworm principle under complex three‐ or four‐phase timing signal drive. Inspired by the idea of ordered structures with functional units, a much simpler nanostep piezoelectric actuator consisting of (2 × 2) arrayed, cofired multilayer piezoceramic actuation units is developed, which operates in an artificially generated quasi shear mode (AGQSM) that is missing in natural piezoelectric ceramics. Under only one‐phase square‐wave voltage drive, the actuator can produce a stable, continual nanostep motion in two ways at nonresonant frequencies, and the obtained minimum step displacement is as low as 7 nm in open control, indicating its potential application as a precise finger or knife actuator in surgical robots. This work is of great guiding significance for future actuator designs using the methodology of ordered structure with piezoceramic actuation units and AGQSM.

Keywords

• artificially generated quasi shear mode (AGQSM)
• cofired multilayer ceramic
• nanostep motion
• ordered structure with piezoceramic actuation units (OSPAU)
• piezoelectric actuators