Synergetic surface modification effect of argon and oxygen for diamond films by MPCVD

Abstract

Diamond films were synthesized in a CH4-H2 system with good surface quality by adjusting the additive amount of argon and oxygen gas. The diamond phase content and surface roughness of samples are 86.1% and 81.5 nm, respectively. The results indicate that only Ar addition will decrease the purity of diamond films, whereas Ar-O2 mixed gas can further increase the diamond phase content. It is worth noting that the content of diamond phase has no significant increase when O2 flow exceed 1 sccm. The surface roughness reduced from 199.8 to 81.5 nm by the addition of 14 sccm Ar and 1 sccm O2, and the surface quality will be deteriorated in case of further increasing O2 or decreasing Ar concentration. Meanwhile, the growth rate under different conditions and the synergetic surface modification effect of Ar-O2 mixed gas for diamond films growth process were discussed.

Keywords

• diamond films
• mpcvd
• synergetic effect
• surface roughness