A Sensitivity-Optimized Flexible Capacitive Pressure Sensor with Cylindrical Ladder Microstructural Dielectric Layers
Tian Hua,
Ziyin Xiang,
Xiangling Xia,
Zhangling Li,
Dandan Sun,
Yuanzhao Wu,
Yiwei Liu,
Jie Shang,
Jun Chen,
Runwei Li
Affiliations
Tian Hua
School of Materials Science and Engineering, Jiangxi Provincial Key Laboratory of Power Batteries and Materials, Jiangxi University of Sciences and Technology, Ganzhou 341000, China
Ziyin Xiang
CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences, Ningbo 315201, China
Xiangling Xia
CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences, Ningbo 315201, China
Zhangling Li
CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences, Ningbo 315201, China
Dandan Sun
CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences, Ningbo 315201, China
Yuanzhao Wu
CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences, Ningbo 315201, China
Yiwei Liu
CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences, Ningbo 315201, China
Jie Shang
CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences, Ningbo 315201, China
Jun Chen
School of Materials Science and Engineering, Jiangxi Provincial Key Laboratory of Power Batteries and Materials, Jiangxi University of Sciences and Technology, Ganzhou 341000, China
Runwei Li
College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
Flexible capacitive pressure sensors have attracted extensive attention due to their dynamic response and good sensing capability for static and small pressures. Using microstructural dielectric layers is an effective method for improving performance. However, the current state of microstructure design is primarily focused on basic shapes and is largely limited by simulation results; there is still a great deal of potential for further innovation and improvement. This paper innovatively proposes to increase the ladder structure based on the basic microstructures, for example, the long micro-ridge ladder, the cuboid ladder, and cylindrical ladder microstructures. By comparing 9 kinds of microstructures including ladder structure through finite element simulation, it is found that the sensor with a cylindrical ladder microstructure dielectric layer has the highest sensitivity. The dielectric layers with various microstructures are obtained by 3D printed molds, and the sensor with cylindrical ladder microstructure dielectric layer has the sensitivity of 0.12 kPa−1, which is about 3.9 times higher than that without microstructure. The flexible pressure sensor developed by us boasts sensitivity-optimized and operational stability, making it an ideal solution for monitoring rainfall frequency in real time.
