Insights on Capacitive Interdigitated Electrodes Coated with MOF Thin Films: Humidity and VOCs Sensing as a Case Study
Christos Sapsanis,
Hesham Omran,
Valeriya Chernikova,
Osama Shekhah,
Youssef Belmabkhout,
Ulrich Buttner,
Mohamed Eddaoudi,
Khaled N. Salama
Affiliations
Christos Sapsanis
Sensors Lab, Electrical Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
Hesham Omran
Sensors Lab, Electrical Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
Valeriya Chernikova
Advanced Membranes & Porous Materials Center, Chemical Science Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
Osama Shekhah
Advanced Membranes & Porous Materials Center, Chemical Science Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
Youssef Belmabkhout
Advanced Membranes & Porous Materials Center, Chemical Science Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
Ulrich Buttner
Sensors Lab, Electrical Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
Mohamed Eddaoudi
Advanced Membranes & Porous Materials Center, Chemical Science Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
Khaled N. Salama
Sensors Lab, Electrical Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
A prototypical metal-organic framework (MOF), a 2D periodic porous structure based on the assembly of copper ions and benzene dicarboxylate (bdc) ligands (Cu(bdc)·xH2O), was grown successfully as a thin film on interdigitated electrodes (IDEs). IDEs have been used for achieving planar CMOS-compatible low-cost capacitive sensing structures for the detection of humidity and volatile organic compounds (VOCs). Accordingly, the resultant IDEs coated with the Cu(bdc)·xH2O thin film was evaluated, for the first time, as a capacitive sensor for gas sensing applications. A fully automated setup, using LabVIEW interfaces to experiment conduction and data acquisition, was developed in order to measure the associated gas sensing performance.