Recent progress on the study of the transfer standard for micro/nano Newton force measurement in NIM, China

Abstract

Two types of cantilevers are studied in this paper. One type is based on the piezoresistive design and the other type was the regular silicone based cantilevers. The regular cantilevers were measured with the help of the image analysis, so as to measure the real deflection when the regular cantilevers are calibrated based on cantilever on cantilever method. The standard uncertainty of the stiffness measurement is smaller than 3%. The resolution of the piezoresistive cantilever is 0.098 mN/m.

Keywords

• Cantilever
• Stiffness
• Small force
• Electromagnetic compensation
• Piezoresistive