Fushe yanjiu yu fushe gongyi xuebao (Apr 2022)
Low-energy electron beam and its application
Abstract
Low-energy electron beam is an advanced technology that is widely used for manufacturing various high-tech products in the United States, Japan and developed countries in Europe since the 1980s. Owing to the high price of imported electron beam equipment and related processes and raw materials, the promotion of low-energy electron beam technology in China is restricted. In recent years, with the rapid progress in the domestic independent research and development of low-energy electron beam equipment technology, the entry threshold of the downstream industry has been reduced; research conducted by domestic enterprises on new materials, new technologies, and new processes has been extensively promoted, and the bottleneck of industrial development has been broken. Lowenergy electron beam and its application usher in rapid development.
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