FEM-based modeling of microsphere-enhanced interferometry

Abstract

To improve the lateral resolution in microscopic imaging, microspheres are placed close to the object’ s surface in order to support the imaging process by optical near-field information. Although microsphere-assisted measurements are part of various recent studies, no generally accepted explanation for the effect of microspheres exists. Photonic nanojets, enhancement of the numerical aperture, whispering-gallery modes and evanescent waves are usually named reasons in context with microspheres, though none of these effects is proven to be decisive for the resolution enhancement. We present a simulation model of the complete microscopic imaging process of microsphere-enhanced interference microscopy including a rigorous treatment of the light scattering process at the surface of the specimen. The model consideres objective lenses of high numerical aperture providing 3D conical illumination and imaging. The enhanced resolution and magnification by the microsphere is analyzed with respect to the numerical aperture of the objective lenses. Further, we give a criterion for the achievable resolution and demonstrate that a local enhancement of the numerical aperture is the most likely reason for the resolution enhancement.

Keywords

• electromagnetic modeling
• microsphere-assisted microscopy
• interference microscopy
• coherence scanning interferometry
• simulation
• finite element method